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Modelling of Capacitive Pressure Sensor for Medical Applications
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| Author:
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N.SIDDAIAH , VASUJADEVI M, SK.KHADER ZELANI, S NAGAKISHORE BHAVANAM
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| Abstract:
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This study provides the primary evaluation of the use of the Micro Electromechanical Systems (MEMS) Era for the capacitive weight sensor for biomedical applications. The gift gems demonstrate the1 configuration for the COMSOL Multiphysics of the MEMS weight sensor MEMS sensors are commonly used for biomedical applications, because of their reduced force characteristics and the smooth assessment. In the film, the structure of the silicone film (a hundred) is taken to the normal, ordinary weight that is inserted unbeatably into the edge. This enables us to investigate which sensor gradually is successful and provides the precise qualities of the applications.
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| Keyword:
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MEMS; COMSOL Multiphysics; Biomedical; a capacitive pressure sensor.
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| EOI:
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-
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| DOI:
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https://doi.org/10.31838/ijpr/2020.SP2.044
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| Download:
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