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Performance Analysis Of Cantilever Based Bio-Sensor For Pathogen Detection
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| Author:
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1N. SIDDAIAH, T.ROSHINI, V. SAI KRISHNA, G. PRASANTH, , K. LIKHITH
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| Abstract:
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in this fast growing electronic world, there has been many changes which lead to many inventions, one among them is
MEMS. MEMS extended their applications in many sectors which include mechanical sensors, micro fluids, medical
implants, bio-MEMS. In this paper, we discuss the design and analysis two different cantilevers which one of them is a
normal cantilever and the other contains holes at three different positions with a regular intervals. Here the analysis
consists of Eigen-frequency, capacitance, and point load deflection.
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| Keyword:
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MEMS, cantilever, eigen-frequency, capacitance, point load deflection
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| EOI:
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| DOI:
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| Download:
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